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Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning.
Zhijun Yang
Ruirui Huang
Sen Chen
Liyun Su
Ruiqi Li
Published in:
J. Frankl. Inst. (2023)
Keyphrases
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disturbance rejection
structural design
control system
closed loop
image sequences
limit cycle
design process
human motion
optimal design
particle swarm optimization
pid controller
control loop
model predictive control
multi objective
control method
control law