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CMOS compatible MEMs process for post interconnect single chip integration application.

Xiaoxu KangQingyun ZuoJiaqing LiChao YuanYuhang Zhao
Published in: ASICON (2011)
Keyphrases
  • single chip
  • low cost
  • low power
  • high speed
  • cmos image sensor
  • image analysis
  • image sensor
  • highly parallel
  • computer vision
  • high quality
  • multiscale