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CMOS compatible MEMs process for post interconnect single chip integration application.
Xiaoxu Kang
Qingyun Zuo
Jiaqing Li
Chao Yuan
Yuhang Zhao
Published in:
ASICON (2011)
Keyphrases
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single chip
low cost
low power
high speed
cmos image sensor
image analysis
image sensor
highly parallel
computer vision
high quality
multiscale