Band diagram for low-k/Cu interconnects: The starting point for understanding back-end-of-line (BEOL) electrical reliability.
Michael J. MutchThomas PomorskiBrad C. BittelCorey J. CochranePatrick M. LenahanXin LiuRobert J. NemanichJustin BrockmanMarc FrenchMarkus KuhnBenjamin FrenchSean W. KingPublished in: Microelectron. Reliab. (2016)