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Silicon Nanowires embedded pressure sensor with annularly grooved diaphragm for sensitivity improvement.
Songsong Zhang
Tao Wang
Chengkuo Lee
Liang Lou
Wei Mong Tsang
Dim-Lee Kwong
Published in:
ISSNIP (2014)
Keyphrases
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high sensitivity
micro controller
low cost
sensor data
sensor networks
sensitivity analysis
real time
data sets
high speed
embedded systems
information systems
wireless sensor networks
multi sensor
vision sensor