Model on transport phenomena and control of rod growth uniformity in siemens CVD reactor.

Xue-Gang Li Wen-De Xiao

Published in: Comput. Chem. Eng. (2018)

Keyphrases

conceptual model
formal model
parameter estimation
theoretical framework
probabilistic model
analytical model
statistical model
computational model
growth model
genetic algorithm
mathematical model
petri net
em algorithm
markov chain
management system
probability distribution
cost function