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Design and Demonstration of an Electromagnetic Force-Rebalanced Sub-10-Hz Interferometric MEMS Accelerometer.
Cheng Li
Xiang Zheng
Zhenyu Sun
Luqiang Zhou
Xin Guo
Xin Huang
Bo Yang
Published in:
IEEE Trans. Instrum. Meas. (2023)
Keyphrases
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low frequency
high frequency
frequency domain
case study
fourier transform
design methodology
artificial intelligence
user interface
design process
subband
engineering design
genetic algorithm
multiresolution
building blocks
optimal design