ADAPT: An Adaptive Machine Learning Framework with Application to Lithography Hotspot Detection.

Mohamed Baker Alawieh David Z. Pan

Published in: MLCAD (2021)

Keyphrases

machine learning
detection accuracy
main contribution
feature selection
artificial intelligence
pattern recognition
lightweight
information systems
case study
active learning
supervised learning
decision support
anomaly detection
learning algorithm
false positives
automatic detection
real time