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Study on Information and Integrated of MES Big Data and Semiconductor Process Furnace Automation.

Kuo-Chi ChangJeng-Shyang PanKai-Chun ChuDer-Juinn HorngHuang Jing
Published in: ICGEC (2018)
Keyphrases
  • big data
  • information processing
  • data sets
  • social networks
  • information systems
  • text data