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Compensating Misalignment Using Dynamic Random-Effect Control System: A Case of High-Mixed Wafer Fabrication.
Marzieh Khakifirooz
Chen-Fu Chien
Mahdi Fathi
Published in:
IEEE Trans Autom. Sci. Eng. (2019)
Keyphrases
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control system
wafer fabrication
wide range
closed loop
control strategy
dynamically changing
data sets
decision making
dynamic environments
small size
neural network
real world
decision trees
case study
control algorithm
control law