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Novel algorithms for placement of rectangular covers for mask inspection in advanced lithography and other VLSI design applications.

Kanad ChakrabortyAlexey LvovMaharaj Mukherjee
Published in: IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. (2006)
Keyphrases
  • vlsi design
  • computational complexity
  • learning algorithm
  • computational cost
  • optimization problems
  • expert systems
  • computer aided