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A stochastic dynamic programming approach-based yield management with substitution and uncertainty in semiconductor manufacturing.
Guanghua Han
Ming Dong
Xiaofeng Shao
Published in:
Comput. Math. Appl. (2011)
Keyphrases
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semiconductor manufacturing
stochastic dynamic programming
yield management
approximate dynamic programming
influence diagrams
process control
experimental design
finite horizon
continuous state
production system
linear program
sufficient conditions
infinite horizon
state dependent