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A 184nW, 121µg/√Hz Noise Floor Triaxial MEMS Accelerometer with Integrated CMOS Readout Circuit and Variation-Compensated High Voltage MEMS Biasing.

Yimai PengSeokhyeon JeongKyojin ChooYejoong KimLi-Yu ChenRohit RotheLi XuIlya GurinOmid OliaeiVadim TsinkerStephen BartPeter HartwellDavid T. BlaauwDennis Sylvester
Published in: VLSI Technology and Circuits (2022)
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