Petri net modeling and one-wafer scheduling of single-arm multi-cluster tools.
Qinghua ZhuNaiqi WuYan QiaoMengChu ZhouPublished in: CASE (2013)
Keyphrases
- petri net
- colored petri nets
- stochastic petri net
- embedded real time systems
- petri net model
- sequence diagrams
- discrete event systems
- high level petri nets
- manufacturing systems
- web service composition
- wafer fabrication
- reactive systems
- fuzzy petri net
- clustering algorithm
- concurrent systems
- real time systems
- scheduling problem