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Interbay Automated Material Handling System stocker design for wafer fabrication facilities.
Chiahung J. Lin
Taho Yang
Jose M. Padillo
Debbie Beres
Published in:
Int. J. Manuf. Technol. Manag. (2000)
Keyphrases
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material handling
wafer fabrication
case study
engineering design
design tools
genetic algorithm
artificial intelligence
user interface
special case
production system
computer aided