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A systematic dry etching process for profile control of quantum dots and nanoconstrictions.

Madnarski SutiknoUda HashimZul Azhar Zahid Jamal
Published in: Microelectron. J. (2007)
Keyphrases
  • process control
  • control system
  • control charts
  • neural network
  • real world
  • case study
  • computer simulation
  • design process
  • control strategy
  • control theory
  • control structure