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A systematic dry etching process for profile control of quantum dots and nanoconstrictions.
Madnarski Sutikno
Uda Hashim
Zul Azhar Zahid Jamal
Published in:
Microelectron. J. (2007)
Keyphrases
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process control
control system
control charts
neural network
real world
case study
computer simulation
design process
control strategy
control theory
control structure