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Probe test yield optimization based on canonical correlation analysis between process control monitoring variables and probe bin variables.

So Young SohnSu Gak Lee
Published in: Expert Syst. Appl. (2012)
Keyphrases
  • process control
  • canonical correlation analysis
  • variable selection
  • real time
  • machine learning
  • image processing
  • preprocessing
  • least squares
  • generative model
  • equivalence relationship