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The analysis and structural design of micro SOI pressure sensors.

Bian TianYulong ZhaoZhuangde JiangLing ZhangNansheng LiaoYuanhao LiuChao Meng
Published in: NEMS (2009)
Keyphrases
  • structural design
  • neural network
  • image analysis
  • data acquisition
  • real time
  • genetic algorithm
  • object oriented
  • input output