Hierarchical distributed simulation for 300mm wafer fab.
Sheng XuLeon F. McGinnisPublished in: WSC (2007)
Keyphrases
- hierarchical architecture
- distributed systems
- multi agent
- distributed environment
- cooperative
- lightweight
- fault tolerant
- data sets
- integrated circuit
- hierarchical structure
- prostate brachytherapy
- semiconductor manufacturing
- massively parallel
- distributed data
- agent technology
- computing environments
- coarse to fine
- mathematical model
- peer to peer
- control system
- web services
- information systems
- genetic algorithm