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Study of reactive ion etching process to fabricate the PMMA-based polymer waveguide.

Y. ZhaoF. WangZ. C. CuiJ. ZhengH. M. ZhangDaming ZhangS. Y. LiuMaobin Yi
Published in: Microelectron. J. (2004)
Keyphrases
  • statistical analysis
  • neural network
  • data mining
  • multi agent systems
  • fuzzy logic
  • empirical studies
  • process model