Study on Temperature Control Model and Algorithm for the Discharge Cavity of Excimer Laser.

Yan He Longwei Sun Xiaoping Li Hongfei Nie

Published in: DSIT (2021)

Keyphrases

probabilistic model
mathematical model
theoretical analysis
objective function
learning algorithm
k means
optimization algorithm
experimental data
optimization method
neural network
simulated annealing
neural network model
convergence rate
artificial neural networks
multi objective
prediction model