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Atomic Layer Deposition for Fabricating Capacitive Micromachined Ultrasonic Transducers: Initial Characterization.
Lingli Liu
Osama M. Mukdadi
Hyoung Bum Kim
Jean R. Hertzberg
Robin Shandas
Victor Bright
Published in:
ISBI (2004)
Keyphrases
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multi layer
thin film
case study
integrated circuit
data sets
information retrieval
databases
genetic algorithm
video sequences
evolutionary algorithm
control system
finite state machines
initial set
finite automata