Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing.
Marcus MusselmanH. XieDragan DjurdjanovicPublished in: J. Intell. Manuf. (2019)
Keyphrases
- non stationary
- signal analysis
- empirical mode decomposition
- semiconductor manufacturing
- multiresolution
- random fields
- signal processing
- pattern recognition
- feature extraction
- feature space
- feature vectors
- process control
- dynamic programming
- production system
- median filter
- eeg signals
- eeg data
- image processing
- real time