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Temperature Gradient Method for Alleviating Bonding-Induced Warpage in a High-Precision Capacitive MEMS Accelerometer.
Dandan Liu
Huafeng Liu
Jin Quan Liu
Fangjing Hu
Ji Fan
Wen-Jie Wu
Liang Cheng Tu
Published in:
Sensors (2020)
Keyphrases
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high precision
gradient method
high recall
convergence rate
step size
optimization methods
negative matrix factorization
convex formulation
high reliability
achieve high precision
data mining
similarity measure
cost function
signal processing