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A Novel Method for Control Performance Assessment with Fractional Order Signal Processing and Its Application to Semiconductor Manufacturing.

Kai LiuYangQuan ChenPawel D. DomanskiXi Zhang
Published in: Algorithms (2018)
Keyphrases
  • signal processing
  • multiscale
  • real time
  • knowledge base
  • image processing
  • evolutionary algorithm
  • simulated annealing
  • optimization algorithm
  • mathematical model
  • fractional order