An accurate yield estimation approach for multivariate non-normal data in semiconductor quality analysis.
Ingrid KovacsMarina Dana TopaAndi BuzoGeorg PelzPublished in: SMACD (2017)
Keyphrases
- data analysis
- data quality
- high quality
- data processing
- statistical analysis
- data structure
- data sets
- correlation analysis
- database
- data collection
- input data
- data sources
- data objects
- raw data
- synthetic data
- image data
- knowledge discovery
- end users
- training data
- databases
- small number
- original data
- noisy data
- low quality
- error analysis
- high accuracy
- data acquisition
- accurate estimation
- xml documents
- multivariate data