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On the accuracy of analytic approximations for the mean cycle time in semiconductor manufacturing equipment with PM events.
Minho Lee
James R. Morrison
Adar A. Kalir
Kosta Rozen
Published in:
CASE (2017)
Keyphrases
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semiconductor manufacturing
high accuracy
discrete event simulation
process control
computational complexity
prediction accuracy
high precision
hidden markov models
classification accuracy
spatio temporal
data streams
closed form
human activities
image sequences
improved accuracy
data sets
real time