Symbiotic simulation for optimisation of tool operations in semiconductor manufacturing.

Heiko Aydt Stephen John Turner Wentong Cai Boon-Ping Gan

Published in: WSC (2011)

Keyphrases

semiconductor manufacturing
discrete event simulation
process control
data sets
simulation model
real world
genetic algorithm
website
user friendly
simulation tool
discrete event
multiagent based simulation
real time
software tools
numerical simulations
production system
mathematical model