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Blue GaN based LED fabrication using hybrid process of the minimal photolithography system and MOCVD.
Masanori Iwata
Kenji Miyake
Nobuyoshi Yamauchi
Junko Kazusa
Published in:
ICICDT (2016)
Keyphrases
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integrated circuit
data mining
databases
bayesian networks
real time
machine learning
metadata
objective function
data structure
search algorithm
evolutionary algorithm
high speed
process model
process control