Non-contact Mode SPM System Design by Integrating MEMS Electro-static Micro-probe & Laser Doppler Interferometer.

Jium-Ming Lin Chun-Chieh Lin

Published in: SMC (2006)

Keyphrases

real time
data sets
databases
genetic algorithm
website
user interface
signal processing
design process
design decisions
optimal design
decision trees
case study
design principles
engineering design