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Semiconductor sidewall shape estimation.

Philip R. BinghamJeffery R. PriceKenneth W. TobinThomas P. Karnowski
Published in: J. Electronic Imaging (2004)
Keyphrases
  • shape estimation
  • shape from shading
  • shape modeling
  • inverse kinematics
  • structure from motion
  • inverse problems
  • computer vision
  • convex optimization
  • position and orientation