World's First GAA 3nm Foundry platform Technology (SF3) with Novel Multi-Bridge-Channel-FET (MBCFET™) Process.

Jaehun Jeong Sanghyeon Lee Sada-Aki Masuoka Shincheol Min Sanghoon Lee Seungkwon Kim Taehun Myung Byungha Choi Chang-Woo Sohn Sung Won Kim Jeongmin Choi Jungmin Park Hyungjong Lee Taeyoung Kim Seokhoon Kim Yuri Yasuda-Masuoka Ja-Hum Ku Gitae Jeong

Published in: VLSI Technology and Circuits (2023)

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