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Using Explainable Artificial Intelligence to Improve Process Quality: Evidence from Semiconductor Manufacturing.
Julian Senoner
Torbjørn H. Netland
Stefan Feuerriegel
Published in:
Manag. Sci. (2022)
Keyphrases
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artificial intelligence
semiconductor manufacturing
improve quality
process control
high quality
ambient intelligence
expert systems
intelligent agents
evidential reasoning
product quality
low quality
empirical evidence
database
computer science
bayesian networks
case study
databases