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A novel piezoresistive sensitive structure for micromachined high-pressure sensors.

Xin GuoRahman HebibulZhuangde JiangLibo ZhaoTingzhong XuZhiming ZhaoZhikang LiYu XuWendi Gao
Published in: NEMS (2017)
Keyphrases
  • high pressure
  • real time
  • sensor networks
  • sensor data
  • feature space
  • data model
  • mobile robot