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A novel piezoresistive sensitive structure for micromachined high-pressure sensors.
Xin Guo
Rahman Hebibul
Zhuangde Jiang
Libo Zhao
Tingzhong Xu
Zhiming Zhao
Zhikang Li
Yu Xu
Wendi Gao
Published in:
NEMS (2017)
Keyphrases
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high pressure
real time
sensor networks
sensor data
feature space
data model
mobile robot