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Humidity Induced Defect Generation and Its Control during Organic Bottom Anti-reflective Coating in the Photo Lithography Process of Semiconductors.

Seong-Yeol MunSeong-Jun KangYang-Hee Joung
Published in: J. Inform. and Commun. Convergence Engineering (2012)
Keyphrases
  • information systems
  • generation process
  • genetic algorithm
  • decision making
  • control system
  • monitoring system
  • database
  • neural network
  • data mining
  • information retrieval
  • vision system
  • process control
  • control charts