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Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics.
Si-Jun Kim
Sang-Ho Lee
Ye-Bin You
Young-Seok Lee
In-Ho Seong
Chul-Hee Cho
Jang-Jae Lee
Shin-Jae You
Published in:
Sensors (2022)
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