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Multivariable feedback relevant system identification of a wafer stepper system.

Raymond A. de CallafonPaul M. J. Van den Hof
Published in: IEEE Trans. Control. Syst. Technol. (2001)
Keyphrases
  • input output
  • integrated circuit
  • image processing
  • recurrent neural networks
  • search engine
  • computer vision
  • multiscale
  • fuzzy logic
  • case based reasoning
  • closely related
  • massively parallel
  • feedback loop