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Modeling, Scheduling, and Prediction in Wafer Fabrication Systems Using Queueing Petri Net and Genetic Algorithm.
Hung-We Wen
Li-Chen Fu
Shih-Shinh Huang
Published in:
ICRA (2001)
Keyphrases
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petri net
wafer fabrication
genetic algorithm
discrete event systems
colored petri nets
stochastic petri net
embedded real time systems
petri net model
neural network
expert systems
scheduling problem
tabu search
complex systems
manufacturing systems
fuzzy petri net
scheduling algorithm