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A Micro-Topography Measurement and Compensation Method for the Key Component Surface Based on White-Light Interferometry.

Junying ChenBoxuan WangXiuyu ChenQingshan JiangWei FengZhilong XuZhenye Zhao
Published in: Sensors (2023)
Keyphrases
  • detection method
  • pairwise
  • cost function
  • segmentation method
  • cross section
  • dynamic programming
  • three dimensional
  • similarity measure
  • objective function