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Disturbance and Response Time Improvement of Submicrometer Precision Linear Motion System by Using Modified Disturbance Compensator and Internal Model Reference Control.

Hoi-Wai ChowNorbert C. Cheung
Published in: IEEE Trans. Ind. Electron. (2013)
Keyphrases
  • response time
  • objective function
  • mathematical model
  • motion analysis
  • linear model
  • internal and external
  • analytical model