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Disturbance and Response Time Improvement of Submicrometer Precision Linear Motion System by Using Modified Disturbance Compensator and Internal Model Reference Control.
Hoi-Wai Chow
Norbert C. Cheung
Published in:
IEEE Trans. Ind. Electron. (2013)
Keyphrases
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response time
objective function
mathematical model
motion analysis
linear model
internal and external
analytical model