Equipment Anomaly Detection for Semiconductor Manufacturing by Exploiting Unsupervised Learning from Sensory Data.
Chieh-Yu ChenShi-Chung ChangDa-Yin LiaoPublished in: Sensors (2020)
Keyphrases
- anomaly detection
- unsupervised learning
- sensory data
- semiconductor manufacturing
- activity recognition
- intrusion detection
- process control
- sensor data
- supervised learning
- network traffic
- network intrusion detection
- detecting anomalies
- intrusion detection system
- detecting anomalous
- anomalous behavior
- production system
- unsupervised anomaly detection
- semi supervised learning
- dimensionality reduction
- computer security
- semi supervised
- network anomaly detection
- object recognition
- text classification
- feature selection
- malware detection
- machine learning
- self organizing maps
- negative selection algorithm
- one class support vector machines
- detect anomalies
- knowledge discovery
- behavior analysis
- model selection
- network intrusion
- collaborative filtering
- network security
- learning algorithm
- connectionist systems
- text categorization