Development of Nonlinear Electromechanical Coupled Macro Model for Electrostatic MEMS Cantilever Beam.

Akanksha D. Singh Rajendra M. Patrikar

Published in: IEEE Access (2019)

Keyphrases

probabilistic model
linear model
formal model
decision trees
case study
high level

metamodel
prediction model
sensitivity analysis
data sets
statistical model
mathematical model

nonlinear models
conceptual model
high order
experimental data
theoretical framework

parameter estimation
cost function
artificial neural networks
objective function
learning algorithm