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Precisely Assembled Multi Deflection Arrays - Key Components for Multi Shaped Beam Lithography.

Matthias MohauptErik BeckertThomas BurkhardtMarcel HornaffChristoph DammRamona EberhardtAndreas TünnermannHans-Joachim DöringKlaus Reimer
Published in: IPAS (2012)
Keyphrases
  • neural network
  • genetic algorithm
  • information retrieval
  • computer vision
  • three dimensional
  • data sets
  • real world
  • information systems
  • multiresolution