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An Electrothermal Actuator With Two Degrees of Freedom Serving as the Arm of a MEMS Gripper.

Dian-Sheng ChenPo-Fan YehYu-Fan ChenChun-Wei TsaiChun-Yi YinRen-Jie LaiJui-che Tsai
Published in: IEEE Trans. Ind. Electron. (2014)
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