Recognition of semiconductor defect patterns using spatial filtering and spectral clustering.
Chih-Hsuan WangPublished in: Expert Syst. Appl. (2008)
Keyphrases
- spectral clustering
- spatial filtering
- clustering method
- data clustering
- pairwise
- object recognition
- constrained spectral clustering
- similarity matrix
- pattern recognition
- k means
- image segmentation
- signal to noise ratio
- eigendecomposition
- unsupervised learning
- data mining techniques
- normalized cut
- feature extraction
- median filter
- machine learning
- post processing