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Effect of planarity on the 3D integration in 3-D integrated CMOS image sensor.

Nam Hee KwonS. M. HongYong-Won ChaSun Jae LeeHan Gyul LeeAreum KimSoo Won KimChang Hyun KimSung Gyu Pyo
Published in: 3DIC (2011)
Keyphrases
  • cmos image sensor
  • fully integrated
  • low cost
  • single chip
  • image sequences
  • mobile phone
  • parallel processing