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Study of Femtosecond Laser Ablation Effect on Micro-Processing for 4H-SiC Substrate.

Chengwu WangSyuhei KurokawaJulong YuanLi FanHuizong LuZhe WuWeifeng YaoKehua ZhangYu ZhangToshiro Doi
Published in: Int. J. Autom. Technol. (2018)
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