Clustering Wafer Defect Patterns Within the Semiconductor Industry Based on Wafer Maps, Using an Agile Unsupervised Deep Learning Approach.
C. WeberA. TripuramalluP. CzernerM. FathiPublished in: SMC (2021)
Keyphrases
- deep learning
- unsupervised learning
- semiconductor manufacturing
- deep architectures
- wafer fabrication
- unsupervised feature learning
- supervised learning
- weakly supervised
- restricted boltzmann machine
- semi supervised
- machine learning
- deep belief networks
- clustering algorithm
- dimensionality reduction
- text classification
- expectation maximization
- named entities
- domain specific
- automatic extraction
- viewpoint
- high dimensional
- object recognition