A modular structure for a highly detailed model of semiconductor manufacturing.

Sarah J. Hood Amy E. B. Amamoto Antonie T. Vandenberge

Published in: WSC (1989)

Keyphrases

modular structure
computational model
formal model
database
mathematical model
statistical model
similarity measure
cost function
probability distribution
sufficient conditions
theoretical framework
closed form
bayesian framework
simulation model
prediction model
object model