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Automated material handling systems: automated reticle handling: a comparison of distributed and centralized reticle storage and transport.

Anne M. MurrayDavid J. Miller
Published in: WSC (2003)
Keyphrases
  • distributed systems
  • distributed environment
  • single point of failure
  • storage systems
  • material handling
  • multi agent
  • peer to peer
  • computer aided
  • information systems
  • peer to peer systems