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Generation and verification of optimal dispatching policies for multi-product multi-tool semiconductor manufacturing processes.

Chin-Feng ChenKun-Jia WuChuei-Tin ChangDavid Shan-Hill WongShi-Shang Jang
Published in: Comput. Chem. Eng. (2013)
Keyphrases
  • manufacturing processes
  • product quality
  • computer vision
  • high level
  • domain knowledge